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Kaajakari, V., Mattila, T., Oja, A., Kiihamäki, J. and Seppä, H. (2004) Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications. IEEE Electron Device Letters, 25, 173-175.
https://doi.org/10.1109/LED.2004.824840

has been cited by the following article:

• TITLE: Modeling the Physical Parameters of Solenoids for MEMS Applications

  AUTHORS: Mykhaylo Andriychuk, Bohdan Karkulovskyi, Yarko Kuleshnyk

  KEYWORDS: EM Description, Motion Microdevice, Microsolenoid, Stored Energy, Computational Data

  JOURNAL NAME: Journal of Applied Mathematics and Physics, Vol.12 No.5, May 29, 2024

  ABSTRACT: The paper is devoted to study of the electrical parameters of the motion parts of the MEMS such as solenoids. The analytical background is given in order to describe the influence of the electrical field components on the forces, which are result of interaction of the electromagnetic (EM) field components with the parts of motion devices of MEMS. The given analytical formulas open the ability to calculate the self-inductance of the microsolenoids of the different kind, as well as the stored energy of such motion devices, that could be used for the modeling and optimization of parameters of running devices of MEMS such as actuators, sensors etc.