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N. Stojanovic, J. Yun, E. B. K. Washington, J. M. Berg, M. W. Holtz and H. Temkin, “Thin-Film Thermal Con- ductivity Measurement Using Microelectrothermal Test Structures and Finite-Element-Model-Based Data Analy- sis,” Journal of Microelctromechanical System, Vol. 16, No. 5, 2007, pp. 1269-1275. doi:10.1109/JMEMS.2007.900877

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