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Wang, W.Y., Jin, P., Liu, G.P., Li, W., Liu, B., et al. (2014) Effect of High-Temperature Annealing on AlN Thin Film Grown by Metalorganic Chemical Vapor Deposition. Chinese Physics B, 23, Article ID: 087810.
https://doi.org/10.1088/1674-1056/23/8/087810
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