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Ren, Z.M., Lu, Y.F., Ni, H.Q., Liew, T.Y.F., Cheong, B.A., Chow, S.K., Ng, M.L. and Wang, J.P. (2000) Room Temperature Synthesis of c-AlN Thin Films by Nitrogen-Ion-Assisted Pulsed Laser Deposition. Journal of Applied Physics, 88, 7346-7350.
https://doi.org/10.1063/1.1320010

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