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Basillais, A., Benzerga, R., Sanchez, H., Le Menn, E., Boulmer-Leborgne, C. and Perrière, J. (2005) Improvement of the PLD Process Assisted by RF Plasma for AlN Growth. Applied Physics A, 80, 851-859.
https://doi.org/10.1007/s00339-003-2325-z
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