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Garcia-Mendez, M., Morales-Rodriguez, S., Shaji, S., Krishnan, B. and Bartolo-Perez, P. (2011) Structural Properties of Aln Films with Oxygen Content Deposited by Reactive Magnetron Sputtering: XRD and XPS Characterization. Surface Review and Letters, 18, 23-31.
https://doi.org/10.1142/S0218625X1101445X
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