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Li, Y., Trinchi, A., Wlodarski, W., Galatsis, K. and Kalantar-Zadeh, K. (2003) Investigation of the Oxygen Gas Sensing Performance of Ga2O3 Thin Films with Different Dopants. Sensors and Actuators B: Chemical, 93, 431-434.
https://doi.org/10.1016/S0925-4005(03)00171-0

has been cited by the following article:

• TITLE: XPS Depth Profile Study of Sprayed Ga2O3 Thin Films

  AUTHORS: Towhid Adnan Chowdhury

  KEYWORDS: Ga2O3, Thin Films, x-Ray Photoelectron Spectroscopy, Depth Profiling

  JOURNAL NAME: Engineering, Vol.15 No.8, August 4, 2023

  ABSTRACT: Ga2O3 thin films were fabricated by spray pyrolysis method using gallium acetylacetonate as source material and water as oxidizer. The films were annealed at 450°C for 60 minutes in argon atmosphere. X-ray photoelectron spectroscopy (XPS) depth profile studies were carried out to analyze the stoichiometry and composition of sprayed as-deposited and annealed Ga2O3 thin films. Surface layers and the inner layers of as-deposited and annealed films were found nearly stoichiometric.