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Shan, D., Xu, N., Gao, J., Song, N., Liu, H., Tang, Y., et al. (2022) Design of the All-Silicon Long-Wavelength Infrared Achromatic Metalens Based on Deep Silicon Etching. Optics Express, 30, 13616-13629. https://doi.org/10.1364/OE.449870

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