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Miraglia, S., Blouin, C., et al. (2002) ABC Modeling: Advanced Features [Semiconductor Manufacturing]. 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259), Boston, 30 April-2 May 2002, 336-339.
https://doi.org/10.1109/ASMC.2002.1001629

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