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Perraudeau, A., Dublanche-Tixier, C., Tristant, P. and Chazelas, C. (2019) Dynamic Mode Optimization for the Deposition of Homogeneous TiO2 Thin Film by Atmospheric Pressure PECVD Using a Microwave Plasma Torch. Applied Surface Science, 493, 703-709.
https://doi.org/10.1016/j.apsusc.2019.07.057

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