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Xu, J., Kimura, Y., Tsuji, K., Abe, K., Shimizu, T., Hasegawa, H. and Mineta, T. (2020) Fabrication and Characterization of SMA Film Actuator Array with Bias Spring for High-Power MEMS Tactile Display. Microelectronic Engineering, 227, 111-307.
https://doi.org/10.1016/j.mee.2020.111307

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