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Schlachter, F., Barnett, J., Plachetka, U., Nowak, C., Messerscmidt, M., Thesen, M. and Kurz, H. (2016) UV-NIL Based Nanostructuring of Aluminum Using a Novel Organic Imprint Resist Demonstrated for 100 nm Half-Pitch Wire Grid Polarizer. Microelectronic Engineering, 155, 118-121.
https://doi.org/10.1016/j.mee.2016.03.046

has been cited by the following article:

• TITLE: Fabrication of Polarization Control Devices Using Metal Grating Structures

  AUTHORS: Atsushi Motogaito, Yukino Hayashi, Akinori Watanabe, Kazumasa Hiramatsu

  KEYWORDS: Surface Plasmon, Metal Grating, Polarization Control, Plasmonic Metasurface

  JOURNAL NAME: Optics and Photonics Journal, Vol.12 No.9, October 31, 2022

  ABSTRACT: A polarization control device was developed using a plasmonic metasurface with the aim of achieving the desired polarization state. In this study, the Ag metal grating structure was fabricated as a plasmonic metasurface by electron beam lithography and a lift-off process. The phase difference of the fabricated sample was 21.0°. This value is almost consistent with the simulation (24.0°). Then, the transmission and phase difference is dependent on the structural parameter. Because of the propagation of surface plasmon polariton at the interface between Ag and SiO2 or Ag and air, it is believed that the transmittance and the phase difference for TM polarized light can be controlled by the structural parameters. By plotting on the Poincaré sphere after calculating the S-parameter by simulation, it is clear that the arbitrary polarization status can be controlled by the structural parameter.