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Sproul, W.D., Rudnik, P.J. and Gogol, C.A. (1989) The Effect of Target Power on the Nitrogen Partial Pressure Level and Hardness of Reactively Sputtered Titanium Nitride Coatings. Thin Solid Films, 171, 171-181.
https://doi.org/10.1016/0040-6090(89)90042-4

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