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Sundgren, J.-E., Johansson, B.-O., Karlsson, S.-E. and Hentzell, H.T.G. (1983) Mechanisms of Reactive Sputtering of Titanium Nitride and Titanium Carbide II: Morphology and Structure. Thin Solid Films, 105, 367-384.
https://doi.org/10.1016/0040-6090(83)90319-X

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