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Jiang, N., Georgiev, D.G., Wen, T. and Jayatissa, A.H. (2012) Reactive Radio Frequency Sputtering Deposition and Characterisation of Zinc Nitride and Oxynitride Thin Films. Thin Solid Films, 520, 1698-1704.
https://doi.org/10.1016/j.tsf.2011.08.038

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