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Clayton, G.M., Tien, S., Leang, K.K., Zou, Q. and Devasia, S. (2009) A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM. Journal of Dynamic Systems, Measurement, and Control, 131, Article ID: 061101.
https://doi.org/10.1115/1.4000158

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