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Huang, W.W., Li, L., Li, Z.L., Zhu, Z. and Zhu, L.M. (2021) Robust High-Bandwidth Control of Nano-Positioning Stages with Kalman Filter Based Extended State Observer and H∞ Control. Review of Scientific Instruments, 92, Article ID: 065003.
https://doi.org/10.1063/5.0048870
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