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Cheng, S.L., Lin, Y.H., Lee, S.W., et al. (2012) Fabrication of Size-Tunable, Periodic Si Nanohole Arrays by Plasma Modified Nanosphere Lithography and Anisotropic Wet Etching. Applied Surface Science, 263, 430-435.
https://doi.org/10.1016/j.apsusc.2012.09.073

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