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Wang, W., Jia, J. and Li, J. (2013) Slide Film Damping in Microelectromechanical System Devices. Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, 227, 162-170.
https://doi.org/10.1177/1740349913486097

has been cited by the following article:

• TITLE: Effect of Ballistic Bouncing of Gas Particles across a Microchannel on Rarefied Gas Flows

  AUTHORS: Nikolai Kislov

  KEYWORDS: Navier-Stokes, CFD, Gas Flow, Rarefied, Microchannel

  JOURNAL NAME: Journal of Applied Mathematics and Physics, Vol.9 No.4, April 29, 2021

  ABSTRACT: This paper proposes a novel computationally efficient method of modeling rarefied gas flow in microchannels based on the newly discovered and mathematically proven Ballistic Principle of the Property Balance in Space (BPPBS). The mechanism of influence of the effect of rarefication on the gas flow is specifically investigated. Also, a differential form of the momentum balance equation governing gas flow in the channel between two parallel plates due to the pressure gradient along the channel and its exact implicit solution in the form of an integral equation have been derived. The theory does not use the generalized concept of viscosity based on the variable mean free path (MFP) in the Knudsen layer (KL). Comparing the normalized flow rate as a function of the inverse Knudsen number according to the current theory and the experimental data shows good agreement in the range of the inverse Knudsen number from 0.01 to about 40. The correlation factor is found to be about 0.995. The results show that our approach based on the BPPBS offers substantial and practical advantages in modeling and simulation of rarefied gases. The validity of the widely disseminated claim of the geometry-dependent MFP in the KL was analyzed.