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M. I. Ilyin, A. I. Kozlitin, S. K. Maksimov, A. V. Nikitin, and V. V. Bannikov, “High Accuracy and Precision Measurements of Line Dimensions of Sub-0.25-Micron and Nanometer Objects in Scanning Electron Microscopy,” Scanning, Vol. 19, 1997, pp. 224-225.

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