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T. Knieling, W. Lang and W. Benecke, “Gas Phase Hydrophobisation of MEMS Silicon Structures with Self-Assembling Monolayers for Avoiding In-Use Sticking,” Sensors and Actuators B: Chemical, Vol. 126, No. 1, 2007, pp. 13-17. doi:10.1016/j.snb.2006.10.023

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