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Zielinski, M., Portail, M., Chassagne, T., Juillaguet, S. and Peyre, H. (2008) Nitrogen Doping of 3C-SiC Thin Films Grown by CVD in a Resistively Heated Horizontal Hot-Wall Reactor. Journal of Crystal Growth, 310, 3174-3182.
https://doi.org/10.1016/j.jcrysgro.2008.03.022

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