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P. Huber, D. Manova, S. Mandl and B. Rauschenbach, “Formation of TiN, TiC and TiCN by Metal Plasma Im- mersion Ion Implantation and Deposition,” Surface and Coatings Technology, Vol. 174-175, 2003, pp. 1243-1247. doi:10.1016/S0257-8972(03)00458-4

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