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Y. Minhao, M. J. Henderson and A. Gibaud, “On the Etching of Silica and Mesoporous Silica Films Determined by X-ray Reflectivity and Atomic Force Microscopy,” Thin Solid Films, Vol. 514, 2009, pp. 3028-3035. doi:10.1016/j.tsf.2008.12.017

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