Article citationsMore>>

X. Li, T. Abe and M. Esashi, “Fabrication of High-Density Electrical Feed-Throughs by Deep-Reactive-Ion Etching of Pyrex Glass,” Journal of Microelectromechanical Systems, Vol. 1-6, 2002, pp. 625-630.

has been cited by the following article:

SCIRP Newsletter
Copyright © 2006-2026 Scientific Research Publishing Inc. All Rights Reserved.
Top