TITLE:
Comparison of Epitaxial and Textured Ferroelectric BaTiO3 Thin Films
AUTHORS:
Baba Wague, Nicolas Baboux, Pedro Rojo Romeo, Yves Robach, Bertrand Vilquin
KEYWORDS:
Ferroelectric, Barium Titanate, Thin Film, Silicon, Sputtering, Epitaxy
JOURNAL NAME:
Journal of Modern Physics,
Vol.11 No.4,
April
8,
2020
ABSTRACT: The properties of BaTiO3 (BTO) thin films deposited on different substrates by RF magnetron sputtering were investigated. Two representative substrates were selected and different heterostructures were studied. 1) SrTiO3 (STO) single crystals as a bulk oxide reference material, and 2) silicon as a semiconductor. SrRuO3 (SRO) and Pt bottom electrodes were deposited on the silicon substrate. The BTO structural characterizations show that all the films have (001) crystallographic orientation. We have compared the electrical properties of the different samples: the same dielectric constant and polarization values were obtained independently of the nature of the substrate.