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Kim, H., McIntyre, P.C. and Saraswat, K.C. (2004) Microstructural Evolution of ZrO2-HfO2 Nanolaminate Structures Grown by Atomic Layer Deposition. Journal of Materials Research, 19, 643-650.
https://doi.org/10.1557/jmr.2004.19.2.643

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