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Mousavi, A.K., Abbas, K., Elahi, M.M.M., Lima, E., Moya, S., Butner, J.D., Pinon, D., Benga, A., Mousavi, B.K. and Leseman, Z.C. (2014) Pulsed Vacuum and Etching Systems: Theoretical Design Considerations for a Pulsed Vacuum System and Its Application to XeF 2 Etching of Si. Vacuum, 109, 216-222.
https://doi.org/10.1016/j.vacuum.2014.07.028

has been cited by the following article:

• TITLE: Enhancing Mechanical Stability of Nano-Structured Anti-Reflection Coatings

  AUTHORS: Behnam Kheyraddini Mousavi, Tito Busani, Mani Hossein Zadeh, Steven Roy Julien Brueck

  KEYWORDS: Maximum Transmission, Mechanical Stability, Reflection, Laser, Nano-Structure

  JOURNAL NAME: Journal of Applied Mathematics and Physics, Vol.8 No.2, February 6, 2020

  ABSTRACT: Periodic Nanostructured anti-reflection coatings (NALs) are a promising option for enhancing transmission of coherent light without inducing scattering. We’ve found that reducing the height of NALs below a critical value to enhance mechanical stability can highly reduce the transmission efficiency. Here, using Rigorous Couples Wave Analysis (RCWA), we find the minimum height for over 99% transmission and effect of height on transmission bandwidth. Then, during a one-step plasma etching, two samples with different heights have been generated and their efficiency is evaluated using RCWA.