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Mousavi, B.K., Mousavi, A.K., Hieber, T.J., Chen, J. and Leseman, Z.C. (2019) Mode II Adhesion Energy Analysis of Stiction-Failed Poly-Si Cantilevers Using a MEMS Load Cell. Journal of Micromechanics and Microengineering, 29, Article ID: 075013.
https://doi.org/10.1088/1361-6439/ab173e

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