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You, Y., Ito, A., Tu, R. and Goto, T. (2013) Preparation of the c-Axis Oriented AlN Film by Laser Chemical Vapor Deposition Using a Newly Proposed Al(acac)3 Precursor. Journal of Crystal Growth, 365, 1-5.
https://doi.org/10.1016/j.jcrysgro.2012.12.034

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