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Mousavi, A.K., Abbas, K., Elahi, M.M.M., Lima, E., Moya, S., Butner, J.D., Pinon, D., Benga, A., Mousavi, B.K. and Leseman, Z.C. (2014) Pulsed Vacuum and Etching Systems: Theoretical Design Considerations for a Pulsed Vacuum System and Its Application to XeF2 Etching of Si. Vacuum, 109, 216-222.
https://doi.org/10.1016/j.vacuum.2014.07.028

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