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Ellerington, N., Bschaden, B., Hubbard, T. and Kujath, M. (2012) Fourier Analysis of Blurred Images for the Measurement of the In-Plane Dynamics of MEMS. Journal of Micromechanics and Microengineering, 22, Article Number: 035019.
https://doi.org/10.1088/0960-1317/22/3/035019
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