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Li, S., Outka, D. and Shih, H. (2010) Cracks in Anodized Aluminum Film. Lam Research Confidential Technical Reports, August 26, 2009, September 8, 2009, November 11, 2009, February 5, 2010, September 23, 2010, November 12, 2010, and November 30.

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