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Johansson, A., Calleja, M., Rasmussen, P.A. and Boisen, A. (2005) SU-8 Cantilever Sensor System with Integrated Readout. Sensors and Actuators A, 123-124, 111-115.
https://doi.org/10.1016/j.sna.2005.03.025

has been cited by the following article:

• TITLE: Improved Transfer Process for the Fully Additive Manufacturing of a Conductive Layer-Stacked Polymeric Cantilever

  AUTHORS: Shusuke Kanazawa, Yasuyuki Kusaka, Noritaka Yamamoto, Hirobumi Ushijima

  KEYWORDS: Additive Manufacturing, MEMS, Screen Printing, Polymer, Sensor

  JOURNAL NAME: Materials Sciences and Applications, Vol.10 No.1, January 14, 2019

  ABSTRACT: This paper reports on an efficient fabrication process for a polymeric cantilever covered with conductive nano silver. The entire structure can be constructed additively using a printing process, without the use of an etching process or a sacrificial layer. The fabricated cantilever exhibits good linearity and forms a submillimeter-ordered air gap between itself and the substrate surface. Fine operation of a capacitive force gauge was obtained using the capacitance between the conductive cantilever and an electrode on the substrate. This process is expected to make possible the efficient manufacturing of various types of sensors that measure mechanical strain in a cantilever structure.