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Y. Lim, M. Chaudhri and Y. Enomoto, “Accurate Determination of the Mechanical Properties of Thin Aluminum Films Deposited on Sapphire Flats Using Nanoindentation,” Journal of Materials Research, Vol. 14, No. 6, 1999, pp. 2314-2327. doi:10.1557/JMR.1999.0308

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