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Fathauer, R.W., Grunthaner, P.J., Lin, T.L., Chang, K.T., Mazur, J.H. and Jamieson, D.N. (1988) Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 6, 708-712.
https://doi.org/10.1116/1.584352

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