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Lee, D.H., Cho, Y.S., Yi, W.I., Kim, T.S., Lee, J.K. and Jung, H.J. (1995) Metalorganic Chemical Vapor Deposition of TiO2:N Anatase Thin Film on Si Substrate. Applied Physics Letters, 66, 815-816.
https://doi.org/10.1063/1.113430

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