Article citationsMore>>
Campbell, S.A., Gilmer, D.C., Wang, X.-C., Hsieh, M.-T., Kim, H.-S., Gladfelter, W.L. and Yan, J. (1997) MOSFET Transistors Fabricated with High Permitivity TiO2 Dielectrics. IEEE Transactions on Electron Devices, 44, 104-109.
https://doi.org/10.1109/16.554800
has been cited by the following article:
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TITLE:
Unique Pulsed-Laser Deposition Production of Anatase and Rutile TiO2 on Al2O3
AUTHORS:
Alexandra Gordienko, Anthony B. Kaye
KEYWORDS:
Titania, Anatase, Rutile, Sapphire, PLD
JOURNAL NAME:
Crystal Structure Theory and Applications,
Vol.7 No.2,
May
31,
2018
ABSTRACT: Two pure hexagonal phases of titanium dioxide, anatase and rutile, were grown on c-cut Al2O3 substrates via pulsed-laser deposition by changing only the growth and annealing conditions, but without changing the substrate, target, or working gas. Purity of each phase was confirmed by x-ray diffraction, the quality of each film was studied using atomic force microscopy and scanning electron microscopy, and the interface between each substrate and film was studied using x-ray photoelectron spectroscopy. A binding layer of Ti2O3 was found to explain anatase growth under the very large lattice mismatch conditions.