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Yang, J.H., Kang, S.M., Dinh, D.V. and Yoon, D.H. (2009) Influence of AlN Buffer Layer Thickness and Deposition Methods on GaN Epitaxial Growth. Thin Solid Films, 517, 5057-506.
https://doi.org/10.1016/j.tsf.2009.03.089

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