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Bhushan, B. and Li, X.D. (1997) Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microe-lectromechanical Systems Devices. J. Mater. Res, 1997, 54-63. https://doi.org/10.1557/JMR.1997.0010

has been cited by the following article:

• TITLE: Experimental Study on Electrostatically Actuated Micro-Gripper Based on Silica Process

  AUTHORS: Pengnian Yang, Yuhe Li, Yong Li, Qingxiang Li

  KEYWORDS: Micro-Gripper, Image Process, Experimental Analysis

  JOURNAL NAME: World Journal of Engineering and Technology, Vol.5 No.4B, October 12, 2017

  ABSTRACT: The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors that cause the difference between the theoretical design and the actual test performance are analyzed, and the design method and experimental results is obtained for the micro-gripper in the field of micro-assembly.