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Zhou, H.P., Xu, L.X., Xu, S., Huang, S.Y., Wei, D.Y., Xiao, S.Q., Yan, W.S. and Xu, M. (2010) On Conductivity Type Conversion of p-Type Silicon Exposed to a Low-Frequency Inductively Coupled Plasma of Ar + H2. Journal of Physics D: Applied Physics, 43, Article No: 505402.
https://doi.org/10.1088/0022-3727/43/50/505402

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