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S. A. Sakwe, R. Müller and P. J. Wellmann, “Optimization of KOH Etching Parameters for Quantitative Defect Recognition in n- and p-Type Doped SiC,” Journal of Crystal Growth, Vol. 289, No. 2, April 2006, pp. 520-526. doi:10.1016/j.jcrysgro.2005.11.096

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