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Samani, M.K., Ding, X.Z., Amini, S., Khosravian, N., Cheong, J.Y., Chen, G. and Tay, B.K. (2013) Thermal Conductivity of Titanium Aluminum Silicon Nitride Coatings Deposited by Lateral Rotating Cathode Arc. Thin Solid Films, 537, 108-112.
https://doi.org/10.1016/j.tsf.2013.04.029

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