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Jan, C.-H., et al. (2012) A 22 nm SoC Platform Technology Featuring 3-D Tri-Gate and High-k/Metal Gate, Optimized for Ultra Low Power, High Performance and High Density SoC Applications. 2012 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, 10-13 December 2012, 3.1.1-3.1.4.
https://doi.org/10.1109/IEDM.2012.6478969

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