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Auth, C., et al. (2012) A 22 nm High Performance and Low-Power CMOS Technology Featuring Fully-Depleted Tri-Gate Transistors, Self-Aligned Contacts and High Density MIM Capacitors. 2012 Symposium on VLSI Technology (VLSIT), Honolulu, HI, 12-14 June 2012, 131-132.
https://doi.org/10.1109/VLSIT.2012.6242496

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