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Chen, Z., Salagaj, T., Jensen, C., Strobl, K., Nakarmi, M. and Shum, K. (2009) ZnO Thin Film Deposition on Sapphire Substrates by Chemical Vapor Deposition. MRS Online Proceeding, 1167, 1167-O07.
https://doi.org/10.1557/proc-1167-o07-09

has been cited by the following article:

• TITLE: Spray Pyrolysis Deposition of Single and Mixed Oxide Thin Films

  AUTHORS: Olusegun J. Ilegbusi, S. M. Navid Khatami, Leonid I. Trakhtenberg

  KEYWORDS: Zinc Oxide Film, Tin Oxide Film, Mixed Metal Oxides, Nano-Composite Sen-sors, Spray Pyrolysis

  JOURNAL NAME: Materials Sciences and Applications, Vol.8 No.2, February 6, 2017

  ABSTRACT: The influence of processing parameters is investigated on the structural characteristics of single and mixed oxides produced by spray pyrolysis technique. The films were synthesized by spraying precursor solutions through a noz-zle onto a heated alumina substrate. The precursor consisted separately of aqueous solutions of tin chloride for SnO2 and zinc chloride for ZnO for single oxide cases, and aqueous solutions of tin chloride and indium nitrate for SnO2 + In2O3 and zinc chloride and indium nitrate solutions for ZnO + In2O3 for mixed oxide cases. The substrate temperature was varied accordingly for each single and mixed case. The films produced were characterized by X-ray Photoelectron Spectroscopy and Scanning Electron Microscopy. The results indicate that a non-homogenous film is formed at low temperature for both single oxides considered. The temperature has significant effect on the composition of the synthesized films of both single oxides below 450℃. The results for mixed oxides show that the best homogeneous films are obtained for 80 wt% ZnO + 20 wt% In2O3, and 80 wt% SnO2 + 20 wt% In2O3.