TITLE:
TEM and STEM Observations of a Flat Continuous Silicon-Germanium Thin Film Epitaxially Grown on Porous Silicon
AUTHORS:
Junji Yamanaka, Noritaka Usami, Sevak Amtablian, Alain Fave, Mustapha Lemiti, Chiaya Yamamoto, Kiyokazu Nakagawa
KEYWORDS:
Porous Silicon, Silicon Germanium, Strain Relaxation, Strained Silicon, Nanostructure, High-Mobility Semiconductors, Transmission Electron Microscopy
JOURNAL NAME:
Journal of Materials Science and Chemical Engineering,
Vol.5 No.1,
January
4,
2017
ABSTRACT: Strain-relaxed SiGe is an attractive material for use as a substrate of strained Si, in which carrier mobility is higher than that of bulk Si. The concept of this study is the use of porous Si as a sponge like substrate so that a SiGe lattice can relax without introducing dislocations. We produced porous Si specimens by electrochemical anodization and annealed them under a H2 atmosphere. Then, SiGe thin films were grown by gas-source molecular beam epitaxy. We observed the microstructure of the specimens using transmission electron microscopy. The result showed that we succeeded in producing a single-crys- tal continuous Si0.73Ge0.27 film with a 10% relaxation ratio and a low dislocation density on porous Si.