TITLE:
Optical Spectroscopic Investigation of TiO2-Like Polymerization Processes by Inductively Coupled Plasma
AUTHORS:
Z. Li, X. Li, G. Liu, J.-J. Pireaux, L. Houssiau, N. Bonifaci
KEYWORDS:
Plasma, Polymerization, Surface
JOURNAL NAME:
Journal of Applied Mathematics and Physics,
Vol.4 No.8,
August
15,
2016
ABSTRACT: TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency (RF) modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments formed in the discharge were dependent on the precursor, and that the species density in the plasma gas is as a function of flux de gas that is used to carry the monomer into the plasma reactors.