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Gebhard, U., Hein, H., Just, E. and Ruther, P. (1997) Combination of a Fluidic Micro-Oscillator and Micro-Actuator in LIGA-Technique for Medical Application. International Conference on Solid State Sensors and Transducers of the IEEE, Chicago, June 16-19 1997. http://dx.doi.org/10.1109/sensor.1997.635211
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