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Kim, W.-H., Maeng, W.J., Moon, K.-J., Myoung, J.-M. and Kim, H. (2010) Growth Characteristics and Electrical Properties of La2O3 Gate Oxides Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition. Thin Solid Films, 519, 362-366.
http://dx.doi.org/10.1016/j.tsf.2010.07.108

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